Depiction of the Ambipolar-State of the Gas-Substrate Interphase of the Electron Cyclotron Resonance – Microwave – Chemical Vapor Deposition (Ecr-Mw-Cvd) Method and Its Influence over the Properties of Vapor-Deposited Hydrocarbon Films
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Book Details :
Depiction of the Ambipolar-State of the Gas-Substrate Interphase of the Electron Cyclotron Resonance – Microwave – Chemical Vapor Deposition (Ecr-Mw-Cvd) Method and Its Influence over the Properties of Vapor-Deposited Hydrocarbon Films